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Pump exhaust device Product List

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Turbo Molecular Pump Exhaust System "HUVS Series"

Turbo molecular pump exhaust system available with exhaust speeds of 250L/s and 77L/s! You can freely choose the combination of pumps and vacuum gauges!

The "HUVS Series" is a turbo molecular pump exhaust system that employs a turbo molecular pump with a high compression ratio (compression ratio of 1×10 to the 11th power). It is available in two types with exhaust speeds of 250 L/sec and 77 L/sec. It comes standard with a full-range vacuum gauge. It is also equipped with a switching function for simultaneous startup of the turbo molecular pump and rotary pump, as well as standalone startup of the rotary pump. 【Features】 ■ Two models available with exhaust speeds of 250 L/sec and 77 L/sec ■ High compression ratio (adopts a turbo molecular pump with a compression ratio of 1×10 to the 11th power) ■ Switching function for simultaneous startup of the turbo molecular pump and rotary pump, and standalone startup of the rotary pump ■ Standard equipped with a full-range vacuum gauge (displayed on the TMP controller) ■ Option to select exhaust pumps from any manufacturer ■ The forevalve is equipped with an automatic leak valve as a countermeasure against backflow during power outages *For more details, please download the PDF or contact us.

  • Ventilation and Exhaust
  • Pump exhaust device

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